![一种双窄支撑梁高品质因数的压电谐振器](/CN/2016/1/33/images/201610168600.jpg)
基本信息:
- 专利标题: 一种双窄支撑梁高品质因数的压电谐振器
- 专利标题(英):Piezoelectric resonator with two narrow support beams and high quality factor
- 申请号:CN201610168600.8 申请日:2016-03-22
- 公开(公告)号:CN105871350A 公开(公告)日:2016-08-17
- 发明人: 鲍景富 , 李昕熠 , 秦风 , 张超 , 张翼 , 张亭
- 申请人: 电子科技大学
- 申请人地址: 四川省成都市高新区(西区)西源大道2006号
- 专利权人: 电子科技大学
- 当前专利权人: 电子科技大学
- 当前专利权人地址: 四川省成都市高新区(西区)西源大道2006号
- 代理机构: 电子科技大学专利中心
- 代理人: 李明光
- 主分类号: H03H3/02
- IPC分类号: H03H3/02 ; H03H9/56 ; H03H9/58
The invention belongs to the field of electronic science and technology, relates to an MEMS (Micro-Electro-Mechanical System) piezoelectric resonator and provides a piezoelectric resonator with two narrow support beams and a high quality factor. The piezoelectric resonator comprises a vibration block, an input end support beam, an output end support beam, an input end support table, an output end support table and a base, wherein the vibration block is electrically connected to the support tables through the support beams; the support tables are arranged on the base; external metal electrodes are arranged on the support tables; the vibration block is formed by an input end P type semiconductor area and an N type semiconductor area, wherein the input end P type semiconductor area is arranged at a connection place of the vibration block and the input end support beam; the support beams for connecting the areas of the vibration blocks and the corresponding areas of the vibration block adopt the same doping type; a piezoelectric layer partially covers the vibration block; a notch is partially exposed out of the input end P type semiconductor area; and a metal electrode arranged on the piezoelectric layer is connected to the input end P type semiconductor area through a transition metal electrode. According to the structure, the width of the support beams can be greatly reduced and the quality factor Q of the resonator can be effectively improved.
公开/授权文献:
- CN105871350B 一种双窄支撑梁高品质因数的压电谐振器 公开/授权日:2019-02-15
IPC结构图谱:
H | 电学 |
--H03 | 基本电子电路 |
----H03H | 阻抗网络,例如谐振电路;谐振器 |
------H03H3/00 | 专用于制造阻抗网络、谐振电路、谐振器的设备或方法 |
--------H03H3/007 | .用于制造机电谐振器或网络 |
----------H03H3/02 | ..用于制造压电或电致伸缩谐振器或网络 |