基本信息:
- 专利标题： 离子植入机及离子植入方法
- 专利标题（英）：Ion implanter and method for ion implantation
- 申请号：CN201610051333.6 申请日：2016-01-26
- 公开(公告)号：CN105826153A 公开(公告)日：2016-08-03
- 发明人： 安瓦尔·侯塞因 , 凡立瑞·立特瓦克
- 申请人： 汉辰科技股份有限公司
- 申请人地址： 中国台湾新竹县宝山乡新竹科学工业园区研新一路18号5楼
- 专利权人： 汉辰科技股份有限公司
- 当前专利权人： 汉辰科技股份有限公司
- 当前专利权人地址： 中国台湾新竹县宝山乡新竹科学工业园区研新一路18号5楼
- 代理机构： 上海专利商标事务所有限公司
- 代理人： 郭蔚
- 优先权： 14/607,867 2015.01.28 US
- 主分类号： H01J37/317
- IPC分类号： H01J37/317 ; H01L21/67 ; H01L21/677
In the embodiment of the invention, an ion implanter comprising a process chamber, a FOUP (Front Opening Unified Pod) and a temperature treating assembly is provided. A workpiece can be implanted according to a recipe of ion implantation in the process chamber. The FOUP can transfer a workpiece toward and away from the process chamber. The temperature treating assembly comprises a vacuum chamber, a heating module and a cooling module. The vacuum chamber communicates with the process chamber and has a heating space and a cooling space next to the heating space. The heating module is mounted on the vacuum chamber from a side of the heating space for heating the workpiece located in the heating space to a first temperature. The cooling module is mounted in the cooling space for cooling the workpiece located in the cooling space to a second temperature different from the first temperature. A method for ion implantation is further disclosed.
IPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01J | 放电管或放电灯 |
| ------H01J37/00 | 有把物质或材料引入使受到放电作用的结构的电子管,如为了对其检验或加工的 |
| --------H01J37/02 | .零部件 |
| ----------H01J37/317 | ..用于改变物体的特性或在其上加上薄层的，如离子注入 |