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基本信息:
- 专利标题: 一种半导体芯片封装结构及其制作方法
- 专利标题(英):Semiconductor chip packaging structure and manufacturing method thereof
- 申请号:CN201610242938.3 申请日:2016-04-19
- 公开(公告)号:CN105810601A 公开(公告)日:2016-07-27
- 发明人: 刘建宏
- 申请人: 南通富士通微电子股份有限公司
- 申请人地址: 江苏省南通市崇川区崇川288号
- 专利权人: 南通富士通微电子股份有限公司
- 当前专利权人: 通富微电子股份有限公司
- 当前专利权人地址: 江苏省南通市崇川区崇川288号
- 代理机构: 深圳市威世博知识产权代理事务所
- 代理人: 何青瓦
- 主分类号: H01L21/60
- IPC分类号: H01L21/60 ; H01L23/488
The invention provides a semiconductor chip packaging structure and a manufacturing method thereof. The method comprises the steps as follows: a plurality of electrodes which are arranged at intervals are formed on a semiconductor substrate; a sputtering conductive layer covering the semiconductor substrate and the electrodes is formed; an insulating protection layer is formed on the sputtering conductive layer outside the electrodes; the insulating protection layer comprises a first insulating protection block and a second insulating protection blocks, which are arranged at two sides of each electrode respectively; a metal layer and a soldering tin layer are sequentially formed on the sputtering conductive layer between each first insulating protection block and the corresponding second insulating protection block; and the sputtering conductive layer outside the first insulating protection blocks and the second insulating protection blocks is etched. In the manner, the undercut defect between the sputtering conductive layer and each metal layer can be avoided; the contact area of the sputtering conductive layer and each metal layer is increased; soldering tin is prevented from being injected into the sputtering conductive layer to form a mesoporous metal compound, so that the stability and the reliability of the semiconductor chip packaging structure are improved.
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/02 | .半导体器件或其部件的制造或处理 |
----------H01L21/027 | ..未在H01L21/18或H01L21/34组中包含的为进一步的光刻工艺在半导体之上制作掩膜 |
------------H01L21/50 | ...应用H01L21/06至H01L21/326中的任一小组都不包含的方法或设备组装半导体器件的 |
--------------H01L21/60 | ....引线或其他导电构件的连接,用于工作时向或由器件传导电流 |