![四极质量分析器的对杆平行度测量系统](/CN/2016/1/35/images/201610178358.jpg)
基本信息:
- 专利标题: 四极质量分析器的对杆平行度测量系统
- 专利标题(英):Opposite-pole parallelism measuring system of quadrupole mass analyzer
- 申请号:CN201610178358.2 申请日:2016-03-25
- 公开(公告)号:CN105783704A 公开(公告)日:2016-07-20
- 发明人: 曹衍龙 , 官大衍 , 何泽威 , 王敬 , 王乐乐 , 杨将新
- 申请人: 浙江大学
- 申请人地址: 浙江省杭州市西湖区余杭塘路866号
- 专利权人: 浙江大学
- 当前专利权人: 浙江大学
- 当前专利权人地址: 浙江省杭州市西湖区余杭塘路866号
- 代理机构: 杭州金道专利代理有限公司
- 代理人: 黄芳
- 主分类号: G01B7/31
- IPC分类号: G01B7/31
The invention relates to an opposite-pole parallelism measuring system of a quadrupole mass analyzer. The system includes a pedestal, a sensor mechanism arranged on the pedestal, a clamp which clamps the quadrupole mass analyzer, a linear driving mechanism driving feeding of the clamp and a data processing mechanism; the sensor mechanism comprises a measuring rod and a capacitance sensor assembly, and the capacitance sensor assembly comprises a pair of symmetrical capacitance sensor probes; measuring values of the capacitance sensor probes are numbered in the sequence of sampling time; the data processing module calculates and measures indication difference x1i and screens a maximal value and a minimal value, and the parallelism, f13=x1max-x1min, between poles is calculated; and the data processing module determines whether the parallelism f13 of the poles is within a parallelism acceptance value f0 range, and is no, alarm is raised. The system of the invention has the advantages that the device is simple in structure and a measurement result is highly stable.
公开/授权文献:
- CN105783704B 四极质量分析器的对杆平行度测量系统 公开/授权日:2019-05-17
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01B | 长度、厚度或类似线性尺寸的计量;角度的计量;面积的计量;不规则的表面或轮廓的计量 |
------G01B7/00 | 以采用电或磁的方法为特征的计量设备 |
--------G01B7/28 | .用于计量轮廓或曲率 |
----------G01B7/31 | ..用于检测轴线准直 |