![MEMS双层悬浮微结构的制作方法和MEMS红外探测器](/CN/2014/1/144/images/201410723696.jpg)
基本信息:
- 专利标题: MEMS双层悬浮微结构的制作方法和MEMS红外探测器
- 申请号:CN201410723696.0 申请日:2014-12-02
- 公开(公告)号:CN105712284B 公开(公告)日:2017-09-29
- 发明人: 荆二荣
- 申请人: 无锡华润上华半导体有限公司
- 申请人地址: 江苏省无锡市国家高新技术产业开发区新洲路8号
- 专利权人: 无锡华润上华半导体有限公司
- 当前专利权人: 无锡华润上华科技有限公司
- 当前专利权人地址: 江苏省无锡市国家高新技术产业开发区新洲路8号
- 代理机构: 广州华进联合专利商标代理有限公司
- 代理人: 邓云鹏
- 主分类号: B81B7/02
- IPC分类号: B81B7/02 ; B81C1/00
A method for manufacturing a MEMS double-layer suspension microstructure comprises steps of: forming a first film body (310) on a substrate (100), and a cantilever beam (320) connected to the substrate (100) and the first film body (310); forming a sacrificial layer (400) on the first film body (310) and the cantilever beam (320); patterning the sacrificial layer (400) located on the first film body (310) to manufacture a recessed portion (410) used for forming a support structure (520), the bottom of the recessed portion (410) being exposed of the first film body (310); depositing a dielectric layer (500) on the sacrificial layer (400); patterning the dielectric layer (500) to manufacture a second film body (510) and the support structure (520), the support structure (520) being connected to the first film body (310) and the second film body (510); and removing the sacrificial layer (400) to obtain the MEMS double-layer suspension microstructure.
公开/授权文献:
- CN105712284A MEMS双层悬浮微结构的制作方法和MEMS红外探测器 公开/授权日:2016-06-29
IPC结构图谱:
B | 作业;运输 |
--B81 | 微观结构技术 |
----B81B | 微观结构的装置或系统,例如微观机械装置 |
------B81B7/00 | 微观结构系统 |
--------B81B7/02 | .包括功能上有特定关系的不同的电或光学装置,例如微—电子—机械系统(MEMS) |