
基本信息:
- 专利标题: 基于悬空p-n结量子阱的光致晶体管及其制备方法
- 专利标题(英):Hung p-n junction quantum well-based photoinduced transistor and preparation method thereof
- 申请号:CN201610132116.X 申请日:2016-03-09
- 公开(公告)号:CN105633194A 公开(公告)日:2016-06-01
- 发明人: 王永进 , 袁威 , 高绪敏 , 蔡玮 , 白丹 , 许银 , 朱桂遐 , 袁炜
- 申请人: 南京邮电大学
- 申请人地址: 江苏省南京市新模范马路66号
- 专利权人: 南京邮电大学
- 当前专利权人: 南京邮电大学
- 当前专利权人地址: 江苏省南京市新模范马路66号
- 代理机构: 江苏爱信律师事务所
- 代理人: 刘琦
- 主分类号: H01L31/173
- IPC分类号: H01L31/173 ; H01L31/18
The invention provides a hung p-n junction quantum well-based photoinduced transistor and a preparation method thereof. A silicon substrate layer under a device structure is stripped and removed by an anisotropic silicon etching technique to obtain a hung nitride film p-n junction quantum well-based photoinduced transistor; and an ultra-thin hanging device is further obtained by a nitride behind-the-back thinning etching technology. According to the hung p-n junction quantum well-based photoinduced transistor, one end of the transistor is taken as an LED light source; and the other end is taken as a photoelectric detector. Due to excellent spectral matching characteristics between two devices, a photoelectric detector can sense a light emitted from an LED device; a photo-signal is converted into an electric signal for output; and the photoinduced transistor characteristics of the devices are achieved. The transistor independently transmits the modulated photo-signal as two common-ground LED light sources, so that two-channel emission of visible light wireless communication is achieved. The transistor can independently sense a spatial photo-signal as two common-ground photoelectric detectors, and achieves dual-channel detection of visible light wireless communication.
公开/授权文献:
- CN105633194B 基于悬空p-n结量子阱的光致晶体管及其制备方法 公开/授权日:2017-12-29