![一种竖直倒装键合设备](/CN/2015/1/201/images/201511005054.jpg)
基本信息:
- 专利标题: 一种竖直倒装键合设备
- 专利标题(英):Vertical flip-chip bonding equipment
- 申请号:CN201511005054.8 申请日:2015-12-28
- 公开(公告)号:CN105609436A 公开(公告)日:2016-05-25
- 发明人: 陈建魁 , 杨思慧 , 洪金华 , 尹周平
- 申请人: 华中科技大学
- 申请人地址: 湖北省武汉市洪山区珞喻路1037号
- 专利权人: 华中科技大学
- 当前专利权人: 华中科技大学
- 当前专利权人地址: 湖北省武汉市洪山区珞喻路1037号
- 代理机构: 华中科技大学专利中心
- 代理人: 梁鹏
- 主分类号: H01L21/60
- IPC分类号: H01L21/60
The invention belongs to the related field of chip mounting equipment and discloses vertical flip-chip bonding equipment. The vertical flip-chip bonding equipment comprises a feeding assembly, a pasting assembly and a two-axis drive assembly, wherein the feeding assembly is used for finishing supplying of a chip; the pasting assembly comprises a turn plate assembly and matched gear dialing mechanism; the turn plate assembly comprises a turn plate, a cam mechanism and a plurality of nozzle assemblies; the axis of the turn plate is parallel to the X-axis direction; the cam mechanism is arranged in the turn plate; and the plurality of nozzle assemblies are distributed at intervals along the circumferential direction of the turn plate, so that the chip which is stamped out from a die plate is adsorbed and transferred and then pasted to a substrate. Furthermore, the gear dialing mechanism is arranged at one side adjacent to the turn plate, and is used for executing rotary motion of each suction assembly along the axis. Through the vertical flip-chip bonding equipment, high-efficiency and high-quality treatment for flip-chip bonding can be achieved through interrelation and cooperation among the various assemblies; and meanwhile, the vertical flip-chip bonding equipment has the advantages of being compact in structure, ingenious in layout, stable and reliable in operation and the like.
公开/授权文献:
- CN105609436B 一种竖直倒装键合设备 公开/授权日:2017-12-12
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/02 | .半导体器件或其部件的制造或处理 |
----------H01L21/027 | ..未在H01L21/18或H01L21/34组中包含的为进一步的光刻工艺在半导体之上制作掩膜 |
------------H01L21/50 | ...应用H01L21/06至H01L21/326中的任一小组都不包含的方法或设备组装半导体器件的 |
--------------H01L21/60 | ....引线或其他导电构件的连接,用于工作时向或由器件传导电流 |