![一种波长修正式多光束角阶梯反射镜激光干涉仪及其测量方法](/CN/2015/1/169/images/201510848301.jpg)
基本信息:
- 专利标题: 一种波长修正式多光束角阶梯反射镜激光干涉仪及其测量方法
- 专利标题(英):Wavelength correction type multi-beam-angle stepped reflector laser interferometer and measuring method thereof
- 申请号:CN201510848301.4 申请日:2015-11-27
- 公开(公告)号:CN105509636A 公开(公告)日:2016-04-20
- 发明人: 许诚昕 , 徐承成 , 李运洪 , 刘俊 , 张白
- 申请人: 成都信息工程大学
- 申请人地址: 四川省成都市西南航空港经济开发区学府路一段24号
- 专利权人: 成都信息工程大学
- 当前专利权人: 新启航半导体有限公司
- 当前专利权人地址: 528000 广东省佛山市高明区荷城街道海田路88号23栋102室
- 代理机构: 四川力久律师事务所
- 代理人: 韩洋
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01B11/02
The invention discloses a wavelength correction type multi-beam-angle stepped reflector laser interferometer comprising a laser source, a spectroscope, a fixed stepped plane angle reflector, a measurement angle reflector unit, and a photoelectric detector group. The measurement angle reflector unit includes a measurement angle reflector and a precise displacement device. The laser source includes n parallel laser beams, wherein the n is larger than or equal to 2. The photoelectric detector group consists of n photoelectric detectors. The reflection planes of the fixed stepped plane angle reflector are n stepped planes; the space between each two reflection planes is expressed by a formula, wherein a k in the formula is a natural number. One beam of laser processed by the spectroscope is transmitted into one reflection plane and then is reflected to one photoelectric detector; and another beam of laser transmitted in the spectroscope is reflected by the measurement angle reflector and the spectroscope and enters the photoelectric detector. The laser interference phenomenon generated by the laser interferometer not only is associated with the laser wavelength but also is associated with the height difference value of the stepped reflection planes. The photoelectric detector group can detect displacement with the precision of a lambda/2n level. During the measurement process, the environment equivalent wavelength can be obtained by using the wavelength correction method, so that the measurement precision is improved obviously.
公开/授权文献:
- CN105509636B 一种采用波长修正式多光束角阶梯反射镜激光干涉仪的测量方法 公开/授权日:2018-02-06
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01B | 长度、厚度或类似线性尺寸的计量;角度的计量;面积的计量;不规则的表面或轮廓的计量 |
------G01B9/00 | 组中所列的及以采用光学测量方法为其特征的仪器 |
--------G01B9/02 | .干涉仪 |