![一种高性能镍铁合金溅射靶材及其制备方法](/CN/2015/1/193/images/201510965185.jpg)
基本信息:
- 专利标题: 一种高性能镍铁合金溅射靶材及其制备方法
- 专利标题(英):High-performance nickel-iron alloy sputtering target material and preparation method thereof
- 申请号:CN201510965185.4 申请日:2015-12-21
- 公开(公告)号:CN105463395A 公开(公告)日:2016-04-06
- 发明人: 徐国进 , 罗俊锋 , 陈明 , 李勇军 , 丁照崇 , 徐学礼 , 张巧霞 , 熊晓东 , 何金江
- 申请人: 有研亿金新材料有限公司
- 申请人地址: 北京市昌平区超前路33号
- 专利权人: 有研亿金新材料有限公司
- 当前专利权人: 有研亿金新材料有限公司
- 当前专利权人地址: 北京市昌平区超前路33号
- 代理机构: 北京众合诚成知识产权代理有限公司
- 代理人: 朱琨
- 主分类号: C23C14/35
- IPC分类号: C23C14/35 ; C22F1/10 ; C21D8/12 ; B23P15/00
The invention belongs to the technical field of target material preparation, and particularly relates to a high-performance nickel-iron alloy sputtering target material and a preparation method thereof. The preparation method comprises the steps that 1, hot forging is conducted on a nickel-iron alloy ingot; 2, the microstructure of nickel-iron alloy is controlled through the cold rolling process and the heat treatment process, and rolling deformation with the total deformation being 1%-20% is conducted on a target billet, so that the magnetic conductivity of the target material is decreased; and 3, the high-performance nickel-iron alloy sputtering target material is obtained through machining. According to the high-performance nickel-iron alloy sputtering target material and the preparation method thereof, the preparation method is simple and suitable for manufacturing target materials of various sizes, the magnetic conductivity of the target material can be decreased, the microstructure is made to be uniform, the average grain size is made to be between 20-100 microns, and the crystallization orientation of the sputtering surface of the target material is irregular.
公开/授权文献:
- CN105463395B 一种高性能镍铁合金溅射靶材及其制备方法 公开/授权日:2018-04-06