基本信息:
- 专利标题： 用于干扰式测量距离的装置
- 申请号：CN201480021342.X 申请日：2014-03-11
- 公开(公告)号：CN105143813B 公开(公告)日：2018-01-23
- 发明人： R.耶尔格 , W.胡贝尔
- 申请人： 约翰内斯·海德汉博士有限公司
- 申请人地址： 德国特劳恩罗伊特
- 专利权人： 约翰内斯·海德汉博士有限公司
- 当前专利权人： 约翰内斯·海德汉博士有限公司
- 当前专利权人地址： 德国特劳恩罗伊特
- 代理机构： 中国专利代理(香港)有限公司
- 代理人： 赵辛; 宣力伟
- 优先权： 102013206693.7 2013.04.15 DE
- 国际申请： PCT/EP2014/054701 2014.03.11
- 国际公布： WO2014/170066 DE 2014.10.23
- 进入国家日期： 2015-10-15
- 主分类号： G01B9/02
- IPC分类号： G01B9/02 ; G01B11/02 ; G01B11/14 ; G01D5/38 ; G01D5/26
A device for interferential distance measurement between two objects that are situated in a movable manner with respect to each other along at least one shifting direction includes at least one light source as well as at least one splitting element, which splits a beam of rays emitted by the light source at a splitting location into at least two partial beams that propagate onward at different angles. The device furthermore includes at least one deflecting element that effects a deflection of the incident partial beams in the direction of a merging location, where the split partial beams are superimposed in an interfering manner and the optical paths of the partial beams of rays between the splitting location and the merging location being arranged such that the traversed optical path lengths of the partial beams between the splitting location and the merging location are identical in the event of a change of distance between the two objects. Furthermore, at least one detector system is provided for detecting distance-dependent signals from the superimposed pair of interfering partial beams.
公开/授权文献:
- CN105143813A 用于干扰式测量距离的装置 公开/授权日：2015-12-09
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01B | 长度、厚度或类似线性尺寸的计量；角度的计量；面积的计量；不规则的表面或轮廓的计量 |
| ------G01B9/00 | 组中所列的及以采用光学测量方法为其特征的仪器 |
| --------G01B9/02 | .干涉仪 |