基本信息:
- 专利标题： 基于飞秒激光复合技术的电容式厚膜压力传感器制备方法
- 专利标题（英）：Capacitance thick film pressure sensor manufacturing method based on femto-second laser hybrid technology
- 申请号：CN201510356527.2 申请日：2015-06-25
- 公开(公告)号：CN104942288A 公开(公告)日：2015-09-30
- 发明人： 刘胜 , 付兴铭 , 曹钢 , 严晗 , 刘亦杰 , 郑怀 , 王小平 , 杨军
- 申请人： 武汉大学 , 武汉飞恩微电子有限公司
- 申请人地址： 湖北省武汉市武昌区珞珈山武汉大学
- 专利权人： 武汉大学,武汉飞恩微电子有限公司
- 当前专利权人： 武汉飞恩微电子有限公司
- 当前专利权人地址： 湖北省武汉市武昌区珞珈山武汉大学
- 代理机构： 武汉科皓知识产权代理事务所
- 代理人： 胡艳
- 主分类号： B22F3/105
- IPC分类号： B22F3/105 ; B28D1/00 ; B33Y10/00
The invention discloses a capacitance thick film pressure sensor manufacturing method based on a femto-second laser hybrid technology. Firstly, according to precision requirements of all layers of a pressure sensor, nanosecond, picosecond or femto-second laser is selected to serve as original laser for scanning, sintering and melting; then, according to real-time monitoring feedback, a specific area is selected to be subjected to finish machining through the picosecond or femto-second laser. According to actual requirements of machining of the pressure sensor, real-time monitoring can be used for size detection, crystalline phase structure detection, microstructure detection, component detection and the like. By means of the method, more precise size control and resistance value control can be achieved, including electrode distance, electrode size and the like. The cleaning procedure, the polishing procedure and the like which are required after traditional 3D printing is finished are omitted, and the problems that powder blowing occurs, residual stress is high and strength is low are effectively solved.
公开/授权文献:
- CN104942288B 基于纳秒‑皮秒‑飞秒激光复合技术的电容式厚膜压力传感器制备方法 公开/授权日：2017-04-12
IPC结构图谱:
| B | 作业；运输 |
| --B22 | 铸造；粉末冶金 |
| ----B22F | 金属粉末的加工；由金属粉末制造制品；金属粉末的制造 |
| ------B22F3/00 | 由金属粉末制造工件或制品，其特点为用压实或烧结的方法；所用的专用设备 |
| --------B22F3/02 | .仅压实 |
| ----------B22F3/105 | ..利用电流、激光辐射或等离子体 |