基本信息:
- 专利标题： 一种显影设备及显影方法
- 专利标题（英）：Developing equipment and developing method
- 申请号：CN201510154683.0 申请日：2015-04-02
- 公开(公告)号：CN104714376A 公开(公告)日：2015-06-17
- 发明人： 马骏 , 黄寅虎 , 韩俊号 , 韩领
- 申请人： 合肥鑫晟光电科技有限公司 , 京东方科技集团股份有限公司
- 申请人地址： 安徽省合肥市新站区工业园内
- 专利权人： 合肥鑫晟光电科技有限公司,京东方科技集团股份有限公司
- 当前专利权人： 合肥鑫晟光电科技有限公司,京东方科技集团股份有限公司
- 当前专利权人地址： 安徽省合肥市新站区工业园内
- 代理机构： 北京同达信恒知识产权代理有限公司
- 代理人： 黄志华
- 主分类号： G03F7/30
- IPC分类号： G03F7/30
The invention discloses developing equipment and a developing method. A signal processing system, a movable air-drying system and a plurality of sensors are arranged in a developing area of the developing equipment; the signal processing system in the developing equipment can be used for determining whether to stop a substrate in the developing area or not according to position inducting information, associated with the developing substrate, generated by the sensors, and controlling the mobile air-drying system to remove a developing liquid on the substrate when the substrate is determined to stop in the developing area and the developing time length of the substrate is determined to reach set developing time length, so that the excessive developing problem of photoresist on the substrate due to the fact that the substrate is stopped on a developing unit is avoided, the substrate product quality is improved, and the process period is shortened.
公开/授权文献:
- CN104714376B 一种显影设备及显影方法 公开/授权日：2018-09-18