
基本信息:
- 专利标题: 曝光装置、掩模及光学膜
- 专利标题(英):Exposure apparatus, mask, and optical film
- 申请号:CN201280076086.5 申请日:2012-10-26
- 公开(公告)号:CN104685417A 公开(公告)日:2015-06-03
- 发明人: 梅泽康昭 , 佐藤达弥 , 浦和宏 , 渡部贤一 , 角张祐一
- 申请人: 株式会社有泽制作所
- 申请人地址: 日本新泻县
- 专利权人: 株式会社有泽制作所
- 当前专利权人: 株式会社有泽制作所
- 当前专利权人地址: 日本新泻县
- 代理机构: 北京路浩知识产权代理有限公司
- 代理人: 谢顺星; 张晶
- 国际申请: PCT/JP2012/006901 2012.10.26
- 国际公布: WO2014/064742 JA 2014.05.01
- 进入国家日期: 2015-03-27
- 主分类号: G03F7/22
- IPC分类号: G03F7/22 ; G02F1/13 ; G02F1/1337 ; G03F1/38 ; G03F7/20
The present invention addresses the problem of having the configuration of an exposure apparatus complicated. This exposure apparatus is provided with: a transfer section that transfers a base material in the transfer direction, said base material having an alignment film formed thereon; a first polarized light output section that outputs, toward the alignment film, first polarized light in the first polarization direction; a second polarized light output section, which is disposed in the downstream of the first polarized light output section in the transfer direction, and which outputs, toward the alignment film, second polarized light in the second polarization direction that intersects the first polarization direction at less than 90 degrees; a first mask section, which is disposed between the base material and the first polarized light output section, and which has formed therein a first opening that passes through the first polarized light for exposing the alignment film, said first mask section blocking the first polarized light; and a second mask section, which is disposed between the base material and the second polarized light output section, and which has formed therein a second opening that passes through the second polarized light for exposing the alignment film, said second mask section blocking the second polarized light. The first opening and the second opening are formed such that a certain region of the alignment film is repeatedly exposed, the first opening includes a first opening region where the first polarized light passes through toward the region, and the second opening includes a second opening region where the second polarized light passes through toward the region.
公开/授权文献:
- CN104685417B 曝光装置、掩模及光学膜 公开/授权日:2017-06-27