基本信息:
- 专利标题： PECVD涂层的检查方法
- 专利标题（英）：Inspection methods for pecvd coatings
- 申请号：CN201380024057.9 申请日：2013-05-09
- 公开(公告)号：CN104619367A 公开(公告)日：2015-05-13
- 发明人： J·T·费尔特斯 , T·E·费斯克 , R·S·阿伯拉姆斯 , J·弗古森 , J·R·弗里德曼 , R·J·潘格伯恩 , P·J·萨高纳 , C·维卡特
- 申请人： SIO2医药产品公司
- 申请人地址： 美国亚拉巴马
- 专利权人： SIO2医药产品公司
- 当前专利权人： SIO2医药产品公司
- 当前专利权人地址： 美国亚拉巴马
- 代理机构： 中国国际贸易促进委员会专利商标事务所
- 代理人： 王贵杰
- 优先权： 61/644,990 2012.05.09 US
- 国际申请： PCT/US2013/040368 2013.05.09
- 国际公布： WO2013/170044 EN 2013.11.14
- 进入国家日期： 2014-11-07
- 主分类号： A61M5/31
- IPC分类号： A61M5/31 ; A61B5/15 ; C23C16/52 ; G01B21/08 ; G01G7/02 ; G01B7/06 ; G01N15/08
A method for inspecting the product of a coating process is provided. In certain embodiments, the release of at least one volatile species from the coated surface into the gas space adjacent to the coated surface is measured and the result is compared with the result for at least one reference object measured under the same test conditions. Microbalance weighing methods are also disclosed to detect and distinguish among PECVD coatings. Thus the presence or absence of the coating, and/or a physical and/or chemical property of the coating can be determined. The method is useful for inspecting any coated articles, e.g. vessels. Its application on the inspection of PECVD coatings made from organosilicon precursors, especially of barrier coatings, is also disclosed.