基本信息:
- 专利标题： 螺旋涂敷装置
- 专利标题（英）：Spiral coating apparatus
- 申请号：CN201410437598.0 申请日：2014-08-29
- 公开(公告)号：CN104437932A 公开(公告)日：2015-03-25
- 发明人： 贵志寿之 , 渊上安彦 , 大城健一
- 申请人： 株式会社东芝
- 申请人地址： 日本东京都
- 专利权人： 株式会社东芝
- 当前专利权人： 株式会社东芝
- 当前专利权人地址： 日本东京都
- 代理机构： 永新专利商标代理有限公司
- 代理人： 庞乃媛; 黄剑锋
- 优先权： 2013-193286 2013.09.18 JP
- 主分类号： B05B13/02
- IPC分类号： B05B13/02 ; B05B13/04 ; B05C13/02
According to one embodiment, a spiral coating apparatus includes: a stage; a nozzle; a movement unit; a gas supply unit; a cleaning liquid supply unit; and a nozzle cleaner. The stage has a placement surface. The nozzle is configured to dispense a liquid onto a coating object placed on the stage. The movement unit is configured to move the nozzle relative to the stage. The gas supply unit is configured to supply a gas. The cleaning liquid supply unit is configured to supply a cleaning liquid. The nozzle cleaner has a gas supply port and a cleaning liquid supply port. The nozzle cleaner is configured to force the gas supplied by the gas supply unit from the gas supply port toward the nozzle and dispense the cleaning liquid supplied by the cleaning liquid supply unit from the cleaning liquid supply port toward the nozzle.