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基本信息:
- 专利标题: 一种用于化学气相沉积方法转移石墨烯薄膜的工装装置
- 专利标题(英):Tooling device for transferring graphene thin films used in chemical vapor deposition method
- 申请号:CN201410754782.8 申请日:2014-12-11
- 公开(公告)号:CN104388934A 公开(公告)日:2015-03-04
- 发明人: 钟达 , 史浩飞 , 邵丽 , 张鹏飞 , 余杰
- 申请人: 重庆墨希科技有限公司 , 中国科学院重庆绿色智能技术研究院
- 申请人地址: 重庆市九龙坡区凤笙路15号附3号
- 专利权人: 重庆墨希科技有限公司,中国科学院重庆绿色智能技术研究院
- 当前专利权人: 重庆墨希科技有限公司,中国科学院重庆绿色智能技术研究院
- 当前专利权人地址: 重庆市九龙坡区凤笙路15号附3号
- 主分类号: C23F1/08
- IPC分类号: C23F1/08
The invention discloses a tooling device for transferring graphene thin films used in a chemical vapor deposition method. The tooling device comprises a base plate, a fixing post, a lower fixture and an upper fixture which are fixedly connected with the base plate, wherein the lower fixture is a square concave block, holes are correspondingly formed in both sides of the concave block, the concave position facilitates an etching solution to inwards flow to etch catalytic substrates, the upper fixture is a square block which has the same length and width as those of the square concave block and holes are formed in the parts, corresponding to the square concave block, of the square block and can penetrate through the fixing post. By the tooling device, a plurality of catalytic substrates on which the graphene thin films grow can be simultaneously etched and thus the production efficiency is increased and meanwhile, the tooling device has the advantages of being simple in structure and easy to manufacture.
公开/授权文献:
- CN104388934B 一种用于化学气相沉积方法转移石墨烯薄膜的工装装置 公开/授权日:2018-04-03