![一种横向沟槽绝缘栅双极型晶体管及其制备方法](/CN/2014/1/114/images/201410571052.jpg)
基本信息:
- 专利标题: 一种横向沟槽绝缘栅双极型晶体管及其制备方法
- 专利标题(英):Transverse groove insulating gate bipolar transistor and manufacturing method thereof
- 申请号:CN201410571052.4 申请日:2014-10-23
- 公开(公告)号:CN104299992A 公开(公告)日:2015-01-21
- 发明人: 孙伟锋 , 喻慧 , 张龙 , 祝靖 , 陆生礼 , 时龙兴
- 申请人: 东南大学
- 申请人地址: 江苏省苏州市工业园区林泉街399号
- 专利权人: 东南大学
- 当前专利权人: 东南大学
- 当前专利权人地址: 江苏省苏州市工业园区林泉街399号
- 代理机构: 江苏永衡昭辉律师事务所
- 代理人: 王斌
- 主分类号: H01L29/739
- IPC分类号: H01L29/739 ; H01L29/41 ; H01L21/28 ; H01L21/331
The invention discloses a transverse groove insulating gate bipolar transistor and a manufacturing method thereof. The transverse groove insulating gate bipolar transistor structurally comprises a P type substrate, a buried oxide layer, a drift region and a deep P type body region. A deep groove grid is arranged on one side of the drift region. A deep P type emitter region and a deep N type emitter region which are connected and extend into the drift region till a BOX layer are arranged in the deep P type body region. Emitter metal is arranged on the deep P type emitter region and the deep N type emitter region which are connected. An N type buffer layer and a P type collector region are arranged on the other side of the deep P type emitter region and the other side of the deep N type emitter region. Collector metal is arranged on the P type collector region. The semiconductor manufacturing method includes the steps of manufacturing the substrate, the buried oxide layer and an N type extension layer, forming an N type emitter, the P type body region and a P type emitter through the combination of the deep groove technology and the multi-extension and high-concentration ion multi-injection technology, forming the N type buffer layer and the P type collector region through the high-concentration ion injection technology, manufacturing a polycrystalline silicon grid through the groove grid technology, and forming electrodes through drilling and aluminum depositing.
公开/授权文献:
- CN104299992B 一种横向沟槽绝缘栅双极型晶体管及其制备方法 公开/授权日:2017-03-22
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L29/00 | 专门适用于整流、放大、振荡或切换,并具有至少一个电位跃变势垒或表面势垒的半导体器件;具有至少一个电位跃变势垒或表面势垒,例如PN结耗尽层或载流子集结层的电容器或电阻器;半导体本体或其电极的零部件 |
--------H01L29/02 | .按其半导体本体的特征区分的 |
----------H01L29/68 | ..只能通过对一个不通有待整流、放大或切换的电流的电极供给电流或施加电位方可进行控制的 |
------------H01L29/70 | ...双极器件 |
--------------H01L29/72 | ....晶体管型器件,如连续响应于所施加的控制信号的 |
----------------H01L29/739 | .....受场效应控制的 |