![一种非晶氧化物薄膜晶体管沟道层及其制备方法](/CN/2014/1/67/images/201410335545.jpg)
基本信息:
- 专利标题: 一种非晶氧化物薄膜晶体管沟道层及其制备方法
- 专利标题(英):Amorphous oxide thin film transistor channel layer and preparing method thereof
- 申请号:CN201410335545.8 申请日:2014-07-15
- 公开(公告)号:CN104091833A 公开(公告)日:2014-10-08
- 发明人: 吕建国 , 江庆军 , 孙汝杰 , 冯丽莎 , 叶志镇
- 申请人: 浙江大学
- 申请人地址: 浙江省杭州市西湖区浙大路38号
- 专利权人: 浙江大学
- 当前专利权人: 浙江大学
- 当前专利权人地址: 浙江省杭州市西湖区浙大路38号
- 代理机构: 杭州宇信知识产权代理事务所
- 代理人: 张宇娟
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L29/10 ; H01L29/221 ; H01L21/336
The invention discloses an amorphous oxide thin film capable of serving as a thin film transistor channel layer and a preparing method of the amorphous oxide thin film. The chemical formula of the amorphous oxide thin film is Zn4In7-xSnxO0.5x+14.5 (0<=x<=7). The preparing method of the amorphous oxide thin film comprises the steps that weighed Zn(NO3)2 6H2O, weighed In(NO3)3 H2O and weighed SnCl2+NH4NO3 are respectively dissolved in dimethylethanol+ acetylacetone+ a 14.5 M ammonia-water solution to from a 0.2 M polymeric pecursor solution respectively, wherein when a Zn source and an In source are prepared, the ratio of the volumes of the dimethylethanol, the acetylacetone and the 14.5 M ammonia-water solution is 25: 1: 0.57 and when an Sn source is prepared, the ratio of the volumes of the dimethylethanol, the acetylacetone and the 14.5 M ammonia-water solution is 25:1:0.285; the mixture is stirred for 6 hours to 24 hours at the temperature ranging from the normal temperature to 50 DEG C, after filtering is conducted, even mixing is conducted according to the fact that the ratio of Zn:In:Sn is 4:(7-x):x (0<=x<=7), and aging is conducted for 4 hours to 24 hours; coating is conducted on a substrate in a spinning mode for film formation and annealing treatment is conducted, wherein the thickness of the thin film ranges from 10 nm to 50 nm. The surface roughness RMS of the prepared thin film is smaller than 2 nm, the carrier concentration ranges from 1014 cm <-3> to 1017 cm <-3>, and the transmittance is larger than 80%; the amorphous oxide thin film serves as the channel layer for preparing a thin film transistor, the threshold voltage ranges from -4 V to 10 V, and the mobility rate ranges from 0.5 cm<2>V<-1>S<-1> to 3 cm<2>V<-1>S<-1>. The amorphous oxide thin film as applied to the thin film transistor has the advantages of being high in mobility rate, capable of reducing the use amount of In, simple in method, low in cost and the like.
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L29/00 | 专门适用于整流、放大、振荡或切换,并具有至少一个电位跃变势垒或表面势垒的半导体器件;具有至少一个电位跃变势垒或表面势垒,例如PN结耗尽层或载流子集结层的电容器或电阻器;半导体本体或其电极的零部件 |
--------H01L29/02 | .按其半导体本体的特征区分的 |
----------H01L29/68 | ..只能通过对一个不通有待整流、放大或切换的电流的电极供给电流或施加电位方可进行控制的 |
------------H01L29/70 | ...双极器件 |
--------------H01L29/762 | ....电荷转移器件 |
----------------H01L29/78 | .....由绝缘栅产生场效应的 |
------------------H01L29/786 | ......薄膜晶体管 |