基本信息:
- 专利标题： 形状测量设备和形状测量方法
- 专利标题（英）：Shape measurement apparatus and method
- 申请号：CN201410266552.7 申请日：2010-05-21
- 公开(公告)号：CN104034280A 公开(公告)日：2014-09-10
- 发明人： 郑仲基 , 金珉永 , 李承埈
- 申请人： 株式会社高永科技
- 申请人地址： 韩国首尔
- 专利权人： 株式会社高永科技
- 当前专利权人： 株式会社高迎科技
- 当前专利权人地址： 韩国首尔
- 代理机构： 西安亿诺专利代理有限公司
- 代理人： 熊雁
- 优先权： 10-2009-0044423 2009.05.21 KR; 10-2010-0007025 2010.01.26 KR
- 分案原申请号： 2010101848861 2010.05.21
- 主分类号： G01B11/24
- IPC分类号： G01B11/24 ; G01N21/956
The invention provides a shape measurement apparatus and method. The shape measurement apparatus includes a work stage supporting a target substrate, a pattern-projecting section including a light source, a grating part partially transmitting and blocking light generated by the light source to generate a grating image and a projecting lens part making the grating image on a measurement target of the target substrate, an image-capturing section capturing the grating image reflected by the measurement target of the target substrate, and a control section controlling the work stage, the pattern-projecting section and the image-capturing section, calculating a reliability index of the grating image and phases of the grating image, which is corresponding to the measurement target, and inspecting the measurement target by using the reliability index and the phases. Thus, the accuracy of measurement may be enhanced.
公开/授权文献:
- CN104034280B 形状测量设备和形状测量方法 公开/授权日：2017-09-08
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01B | 长度、厚度或类似线性尺寸的计量；角度的计量；面积的计量；不规则的表面或轮廓的计量 |
| ------G01B11/00 | 以采用光学方法为特征的计量设备 |
| --------G01B11/24 | .用于计量轮廓或曲率 |