基本信息:
- 专利标题： 硼氮共掺纳米基定向金刚石薄膜的制备方法
- 专利标题（英）：Preparation method of boron-nitrogen co-doped nano-based oriented diamond film
- 申请号：CN201410138529.X 申请日：2014-04-08
- 公开(公告)号：CN103938182A 公开(公告)日：2014-07-23
- 发明人： 王亮 , 孙方宏 , 张文骅 , 沈彬 , 郭睿 , 张志明 , 郭松寿
- 申请人： 上海交通大学 , 上海交友钻石涂层有限公司 , 苏州交钻纳米超硬薄膜有限公司
- 申请人地址： 上海市闵行区东川路800号
- 专利权人： 上海交通大学,上海交友钻石涂层有限公司,苏州交钻纳米超硬薄膜有限公司
- 当前专利权人： 上海交通大学,上海交友钻石涂层有限公司,苏州交钻纳米超硬薄膜有限公司
- 当前专利权人地址： 上海市闵行区东川路800号
- 代理机构： 上海汉声知识产权代理有限公司
- 代理人： 牛山; 陈少凌
- 主分类号： C23C16/30
- IPC分类号： C23C16/30
The invention discloses a preparation method of a boron-nitrogen co-doped nano-based an oriented diamond film. The preparation method comprises the following steps: by taking a heater CVD (Chemical Vapor Deposition) device as deposition equipment, adding boron-nitrogen-containing compounds into a conventional hydrogen and acetone reaction system to form a co-doped system; adjusting the reaction technical parameters; preparing the film where diamond particle particles and oriented diamond particles co-exist. The method is simple in process flow. The obtained film has the characteristics that the film has the surface which is leveler than a randomly oriented micron order diamond film, high and uniform wear resistance, easiness in polishing, low internal stress, high adhesive force of the film base and the like.
公开/授权文献:
- CN103938182B 硼氮共掺纳米基定向金刚石薄膜的制备方法 公开/授权日：2016-05-04