![磁控溅射设备](/CN/2014/1/25/images/201410126503.jpg)
基本信息:
- 专利标题: 磁控溅射设备
- 专利标题(英):Magnetron sputtering equipment
- 申请号:CN201410126503.3 申请日:2014-03-31
- 公开(公告)号:CN103924201A 公开(公告)日:2014-07-16
- 发明人: 刘晓伟 , 郭会斌 , 冯玉春 , 王守坤 , 郭总杰
- 申请人: 京东方科技集团股份有限公司 , 北京京东方显示技术有限公司
- 申请人地址: 北京市朝阳区酒仙桥路10号
- 专利权人: 京东方科技集团股份有限公司,北京京东方显示技术有限公司
- 当前专利权人: 京东方科技集团股份有限公司,北京京东方显示技术有限公司
- 当前专利权人地址: 北京市朝阳区酒仙桥路10号
- 代理机构: 北京银龙知识产权代理有限公司
- 代理人: 许静; 安利霞
- 主分类号: C23C14/35
- IPC分类号: C23C14/35
The invention discloses magnetron sputtering equipment. The magnetron sputtering equipment comprises a film-forming chamber and a plurality of targets which are arranged into a queue; a first heating device opposite to the queue and used for heating a base plate is arranged inside the film-forming chamber; and a second heating device corresponding to gaps among the targets is arranged inside the film-forming chamber. According to the magnetron sputtering equipment disclosed by the invention, the second heating device or the third heating device is utilized, so that formed temperatures on the base plate are not uniform, and temperature difference among different areas on the base plate causes that attaching speed of atoms in different areas on the base plate is different, and therefore, film-forming velocity can be regulated to improve film-forming unevenness. And the magnetron sputtering equipment disclosed by the invention is simple in structure and can effectively prevent the film-forming unevenness on the surface of the substrate.
公开/授权文献:
- CN103924201B 磁控溅射设备 公开/授权日:2016-03-30