
基本信息:
- 专利标题: 一种用于光刻机的嵌入式远程通信及控制方法
- 专利标题(英):Embedded remote communication and control method for photoetching machine
- 申请号:CN201410135685.0 申请日:2014-04-04
- 公开(公告)号:CN103888471A 公开(公告)日:2014-06-25
- 发明人: 陈昌龙 , 唐小萍 , 胡松 , 马平 , 王楠 , 刘俊伯 , 马驰飞 , 何渝
- 申请人: 中国科学院光电技术研究所
- 申请人地址: 四川省成都市双流350信箱
- 专利权人: 中国科学院光电技术研究所
- 当前专利权人: 中国科学院光电技术研究所
- 当前专利权人地址: 四川省成都市双流350信箱
- 代理机构: 北京科迪生专利代理有限责任公司
- 代理人: 孟卜娟; 卢纪
- 主分类号: H04L29/06
- IPC分类号: H04L29/06 ; H04L29/08 ; G03F7/20
The invention provides an embedded remote communication and control method for a photoetching machine. The method includes the following basic steps that firstly, a Tomcat server is built locally, a dynamic webpage is made and used for storing data resources of the photoetching machine, and a client has access to the server through an HTTP; on the server, a second remote control module is connected with the client through a TCP/IP so as to achieve remote communication and control; then, on the client, an Android operation system is operated through an embedded ARM mother board; a first remote control module has access to the Tomcat server through the HTTP so as to obtain related information of the photoetching machine and download documents, video and the like; socket connection is built between the first remote control module and the server through the TCP/IP, picture video information acquired by a camera and sensor parameters are uploaded, and commands sent by the server are received; the first remote control module is communicated with a single-chip microcomputer control daughter board through an RS 232 and sends control commands to a single-chip microcomputer, and therefore motion control over the photoetching machine is achieved.