![一种钕铁硼稀土永磁器件的混合镀膜设备及制造方法](/CN/2014/1/21/images/201410107545.jpg)
基本信息:
- 专利标题: 一种钕铁硼稀土永磁器件的混合镀膜设备及制造方法
- 专利标题(英):Mixed film coating equipment for neodymium iron boron rare-earth permanent magnet components and manufacturing method thereof
- 申请号:CN201410107545.2 申请日:2014-03-22
- 公开(公告)号:CN103839641A 公开(公告)日:2014-06-04
- 发明人: 陈晓东 , 孙宝玉
- 申请人: 沈阳中北真空设备有限公司
- 申请人地址: 辽宁省沈阳市近海经济区近海大街19号
- 专利权人: 沈阳中北真空设备有限公司
- 当前专利权人: 沈阳中北真空设备有限公司
- 当前专利权人地址: 辽宁省沈阳市近海经济区近海大街19号
- 主分类号: H01F1/057
- IPC分类号: H01F1/057 ; H01F41/02 ; C22C33/02 ; C22C38/00 ; B22F9/08 ; B22F3/16 ; C23C14/22
The invention discloses mixed film coating equipment for neodymium iron boron rare-earth permanent magnet components and a manufacturing method of the mixed film coating equipment. The film coating equipment comprises a vacuum chamber, cylinder rotating cathode magnetic control targets, plane cathode magnetic control targets, multi-arc ion targets, rotating stands and material baskets. In the working process, the rotating stands perform revolution in the vacuum chamber, and the two ends of each net-shaped material basket are installed on the corresponding rotating stand through rotary shafts and not only perform revolution along with the rotating stand, but also perform rotation. The cylinder rotating cathode magnetic control targets are installed in the rotating stands in the vacuum chamber, the plane magnetic control targets, the multi-arc ion targets, anode layer linear ion sources and a heating device are installed around the rotating stands in the vacuum chamber, and vacuum film coating is performed in a three-layer mode. The first layer is a magnetron sputtering coating layer, the thickness of the coating layer is 0.1 micrometer-5 micrometers, the second layer is a mixed coating layer of magnetron sputtering and multiple arcs, the thickness of the mixed coating layer is 1 micrometer-15 micrometers, the third layer is a magnetron sputtering coating layer, and the thickness of the coating layer is 0.1 micrometer-5 micrometers. Mixed film coating is adopted as the surface treatment process of the rare-earth permanent magnet components, so that the anti-corrosion capacity of the rare-earth permanent magnet components is improved, and meanwhile the magnetic performance of the rare-earth permanent magnet components is improved.
公开/授权文献:
- CN103839641B 一种钕铁硼稀土永磁器件的混合镀膜设备及制造方法 公开/授权日:2016-10-05
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01F | 磁体;电感;变压器;磁性材料的选择 |
------H01F1/00 | 按所用磁性材料区分的磁体或磁性物体;磁性材料的选择 |
--------H01F1/01 | .无机材料的 |
----------H01F1/03 | ..按其矫顽力区分的 |
------------H01F1/032 | ...硬磁材料的 |
--------------H01F1/04 | ....金属或合金 |
----------------H01F1/047 | .....按其成分区分的合金 |
------------------H01F1/053 | ......含稀土金属的 |
--------------------H01F1/055 | .......和磁性过渡金属的,如SmCo5 |
----------------------H01F1/057 | ........和Ⅲa族元素,如Nd2Fe14B |