![基于单排多层结构的电场式时栅直线位移传感器](/CN/2014/1/20/images/201410102437.jpg)
基本信息:
- 专利标题: 基于单排多层结构的电场式时栅直线位移传感器
- 专利标题(英):Electric field type time grating linear displacement sensor based on single-row multilayered structure
- 申请号:CN201410102437.6 申请日:2014-03-19
- 公开(公告)号:CN103822571A 公开(公告)日:2014-05-28
- 发明人: 刘小康 , 黄沛 , 彭东林 , 郑方燕 , 彭凯
- 申请人: 重庆理工大学
- 申请人地址: 重庆市巴南区李家沱红光大道69号
- 专利权人: 重庆理工大学
- 当前专利权人: 通用技术集团国测时栅科技有限公司
- 当前专利权人地址: 重庆市巴南区李家沱红光大道69号
- 代理机构: 重庆华科专利事务所
- 代理人: 康海燕
- 主分类号: G01B7/02
- IPC分类号: G01B7/02
The invention discloses an electric field type time grating linear displacement sensor based on a single-row multilayered structure. The electric field type time grating linear displacement sensor comprises a measuring head substrate and a fixed ruler substrate, wherein a row of equidistant double-sinusoid-shaped electrodes are arranged on the measuring head substrate; a row of rectangular electrodes are arranged on the fixed ruler substrate, fixed ruler leading wires are arranged at the bottoms of the electrodes, and insulating layers are arranged between the electrodes and the leading wires so as to form the multilayered structure; the measuring head substrate and the fixed ruler substrate are arranged in an upper and lower relative parallel manner, and a gap delta is reserved between the measuring head substrate and the fixed ruler substrate; the measuring head substrate and the fixed ruler substrate move relatively; four electrodes of a fixed ruler in one cycle are respectively connected to uniform amplitude equi-frequency sinusoidal excitation voltages, phase positions of which are respectively 0 degree, 90 degrees, 180 degrees and 270 degrees, and a traveling wave signal Uo generated on the measuring head substrate and an equi-frequency reference signal Ur with a fixed phase position are subjected to phase comparison; the phase difference of the two signals is expressed by an interpolated clock pulse, and a linear displacement value is obtained through transformation. The electric field type time grating linear displacement sensor is low in power dissipation, high in accuracy and simple in structure, has low requirements for installation accuracy of machines, and can realize the nanometer accuracy measurement in a large range.
公开/授权文献:
- CN103822571B 基于单排多层结构的电场式时栅直线位移传感器 公开/授权日:2016-11-02
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01B | 长度、厚度或类似线性尺寸的计量;角度的计量;面积的计量;不规则的表面或轮廓的计量 |
------G01B7/00 | 以采用电或磁的方法为特征的计量设备 |
--------G01B7/02 | .用于计量长度、宽度或厚度 |