![一种用于太阳能电池的基于纳米粒子铜铟硫硒薄膜的制备方法](/CN/2013/1/146/images/201310733812.jpg)
基本信息:
- 专利标题: 一种用于太阳能电池的基于纳米粒子铜铟硫硒薄膜的制备方法
- 专利标题(英):Preparation method of nano-particle-based copper indium sulphur selenium film for solar battery
- 申请号:CN201310733812.2 申请日:2013-12-27
- 公开(公告)号:CN103700725A 公开(公告)日:2014-04-02
- 发明人: 王月 , 王春杰 , 李超 , 张研研 , 陆晓东 , 张凤霞
- 申请人: 渤海大学
- 申请人地址: 辽宁省锦州市高新技术产业区科技路19号
- 专利权人: 渤海大学
- 当前专利权人: 渤海大学
- 当前专利权人地址: 辽宁省锦州市高新技术产业区科技路19号
- 代理机构: 锦州辽西专利事务所
- 代理人: 李辉
- 主分类号: H01L31/18
- IPC分类号: H01L31/18
The invention provides a preparation method of a nano-particle-based copper indium sulphur selenium film for a solar battery. The method comprises the following steps: depositing a molybdenum metal layer used as a back electrode on one side of a substrate by adopting a magnetron sputtering method, preparing a copper indium sulphur absorbing layer on the molybdenum metal layer used as the back electrode, lining the copper indium sulphur absorbing layer in a selenizing furnace, and performing selenizing treatment so as to obtain a copper indium sulphur selenium absorbing layer; sequentially preparing CdS buffer layer, an intrinsic zinc oxide high-resistance layer, an indium oxide tin film low-impedance layer on the copper indium sulphur selenium absorbing layer so as to obtain the copper indium sulphur selenium film for the solar battery. The preparation method has the following advantages that selected raw materials are safe and environment-friendly, the operating method is simple and convenient, other impurities are not introduced, the conversion efficiency of the solar battery is high, requirements on equipment are low, the energy consumption is less, and the method is environment-friendly and suitable for industrial production.
公开/授权文献:
- CN103700725B 一种用于太阳能电池的基于纳米粒子铜铟硫硒薄膜的制备方法 公开/授权日:2016-04-20