基本信息:
- 专利标题： 一种锌镓铝三元氧化物旋转陶瓷靶材及其制备方法
- 专利标题（英）：Zinc-gallium-aluminum ternary oxide rotary ceramic target and preparation method thereof
- 申请号：CN201310706351.X 申请日：2013-12-20
- 公开(公告)号：CN103695849A 公开(公告)日：2014-04-02
- 发明人： 刘秉宁 , 刘孝宁 , 张红梅 , 杨小林 , 征卫星 , 韩建华 , 宋强 , 胡强楠 , 方熙成 , 刘伟 , 王应旺 , 刘东平
- 申请人： 西北稀有金属材料研究院
- 申请人地址： 宁夏回族自治区石嘴山市大武口区冶金路119号
- 专利权人： 西北稀有金属材料研究院
- 当前专利权人： 宁夏中色新材料有限公司
- 当前专利权人地址： 宁夏回族自治区石嘴山市大武口区冶金路119号
- 代理机构： 宁夏专利服务中心
- 代理人： 赵明辉
- 主分类号： C23C14/34
- IPC分类号： C23C14/34 ; C23C14/08 ; C04B35/453 ; C04B35/622
The invention relates to a zinc-gallium-aluminum ternary oxide (hollow tubular shape) rotary ceramic target and a preparation method thereof. The rotary ceramic target is characterized by comprising the following raw materials in percentage by mass: 0.5-3.5% of gallium oxide, 0.5-2.5% of aluminum oxide, 0.002-0.05% of tungsten oxide and the balance of zinc oxide. According to the preparation method, the zinc oxide, gallium oxide, aluminum oxide and trace tungsten oxide are used as raw materials, and the components are uniformly distributed in a matrix by virtue of the dry mixing, roasting and wet ball milling dispersion treatment processes; and the ternary oxide mixed powder has good dispersity and sintering activity. The rotary ceramic target has high density and high yield, the process equipment is simple, the cost is relatively low, and industrialization is easy to realize. The target has high density, low poisoning rate, visible light (400-700nm) transmittance (more than or equal to 90%) and near-infrared region (700-1,400nm) transmittance ( more than or equal to 85%), and is suitable for DC-magnetron sputtering large-area film photovoltaic cell coating.
公开/授权文献:
- CN103695849B 一种锌镓铝三元氧化物旋转陶瓷靶材及其制备方法 公开/授权日：2017-06-20