![一种掩模组件的组装方法](/CN/2013/1/119/images/201310595549.jpg)
基本信息:
- 专利标题: 一种掩模组件的组装方法
- 专利标题(英):Mask assembly assembling method
- 申请号:CN201310595549.5 申请日:2013-11-25
- 公开(公告)号:CN103695840A 公开(公告)日:2014-04-02
- 发明人: 魏志凌 , 高小平 , 魏志浩 , 赵录军 , 张炜平
- 申请人: 昆山允升吉光电科技有限公司
- 申请人地址: 江苏省苏州市昆山市巴城镇红杨路888号
- 专利权人: 昆山允升吉光电科技有限公司
- 当前专利权人: 昆山允升吉光电科技有限公司
- 当前专利权人地址: 江苏省苏州市昆山市巴城镇红杨路888号
- 主分类号: C23C14/04
- IPC分类号: C23C14/04 ; C23C14/24
The invention discloses a mask assembly assembling method. The mask assembly assembling method comprises steps of external force application, tension application, alignment installation and external force release. The mask assembly assembling method is characterized in that through one or more tension application steps, alignment installation steps and external force release steps, one or more mask units are installed to a mask frame; and after all the mask units are installed, all external forces are released so that a mask assembly is obtained. Through the mask assembly assembling method, the shape of the mask frame provided with all the mask units is basically the same as that of the mask frame without the mask units, in other words, the shape of the mask frame is basically unchanged and thus a mask assembly precision is improved so that a precision and quality of the product are improved.