![一种红外光电探测器及其制备方法](/CN/2013/1/115/images/201310579131.jpg)
基本信息:
- 专利标题: 一种红外光电探测器及其制备方法
- 专利标题(英):Infrared photoelectric detector and preparation method thereof
- 申请号:CN201310579131.5 申请日:2013-11-18
- 公开(公告)号:CN103681897A 公开(公告)日:2014-03-26
- 发明人: 梁爽 , 王胜 , 魏楠 , 彭练矛
- 申请人: 北京大学
- 申请人地址: 北京市海淀区颐和园路5号北京大学
- 专利权人: 北京大学
- 当前专利权人: 北京大学
- 当前专利权人地址: 北京市海淀区颐和园路5号北京大学
- 代理机构: 北京君尚知识产权代理事务所
- 代理人: 邵可声
- 主分类号: H01L31/0232
- IPC分类号: H01L31/0232 ; H01L31/101 ; H01L31/18
The invention discloses an infrared photoelectric detector and a preparation method thereof. The detector comprises a substrate. An optical micro-cavity lower reflecting mirror, a lower optical path difference compensation layer, an upper optical path difference compensation layer and an optical micro-cavity upper reflecting mirror which are arranged on the substrate in turn. A semiconductor carbon nano-material photoelectric device used as a light absorption material and a conductive channel is arranged in an optical micro-cavity. The position of the optical micro-cavity with the maximum cavity state density is overlapped with a working area of the semiconductor carbon nano-material photoelectric device. As for infrared light with the same wavelength, an optical path through the lower optical path difference compensation layer is the same with the optical path through the upper optical path difference compensation layer, or difference of the two optical paths is integral times of half wavelength. Capability of detecting weak infrared light is enhanced, and the micro-cavity is simple and rapid in processing technology. The detector can be applied to interconnection of carbon tube circuit photoelectric devices or interconnection of carbon tubes and silicon integrated circuit sheets so that detection and response of communication wave band infrared light are executed.
公开/授权文献:
- CN103681897B 一种红外光电探测器及其制备方法 公开/授权日:2016-04-27