
基本信息:
- 专利标题: 一种AlGaN基双色日盲紫外探测器及制作方法
- 专利标题(英):AlGaN-based bicolor solar blind ultraviolet detector and manufacturing method thereof
- 申请号:CN201310729555.5 申请日:2013-12-26
- 公开(公告)号:CN103646986A 公开(公告)日:2014-03-19
- 发明人: 杨敏 , 种明 , 赵德刚 , 王晓勇 , 苏艳梅 , 孙捷 , 孙秀艳
- 申请人: 中国科学院半导体研究所
- 申请人地址: 北京市海淀区清华东路甲35号
- 专利权人: 中国科学院半导体研究所
- 当前专利权人: 中国科学院半导体研究所
- 当前专利权人地址: 北京市海淀区清华东路甲35号
- 代理机构: 中科专利商标代理有限责任公司
- 代理人: 宋焰琴
- 主分类号: H01L31/105
- IPC分类号: H01L31/105 ; H01L31/18
The invention discloses an AlGaN-based bicolor solar blind ultraviolet detector and a manufacturing method thereof. The detector comprises a substrate, a buffer layer, a n-i-p-i-n unit, an upper table top, a lower table top, an n type ohmic contact metal layer, a p type ohmic contact metal layer, a thickened metal layer and a silicon dioxide layer, wherein the n-i-p-i-n unit comprises a lower n type doping layer, a lower i type active layer, a p type doping layer, an upper i type active layer and an upper n type doping layer which are sequentially grown on the buffer layer; the upper table top is formed by etching the upper n type doping layer, the upper i type active layer and two sides of the p type doping layer; the lower table top is formed by etching the p type doping layers on two sides of the lower portion of the upper table top; and the n type ohmic contact metal layer is grown on the surface of the upper n type doping layer and the upper surface of the lower n type doping layer on one side of the lower table top. The p type ohmic contact metal layer is grown on the upper surface of the p type doping layer on one side of the upper table top; the thickened metal layer is grown on the n type ohmic contact metal layer and the upper surface of the p type ohmic contact metal layer, and the size of the thickened metal layer is larger than that of the ohmic contact metal layer below the thickened metal layer.
公开/授权文献:
- CN103646986B 一种AlGaN基双色日盲紫外探测器及制作方法 公开/授权日:2016-08-17
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L31/00 | 对红外辐射、光、较短波长的电磁辐射,或微粒辐射敏感的,并且专门适用于把这样的辐射能转换为电能的,或者专门适用于通过这样的辐射进行电能控制的半导体器件;专门适用于制造或处理这些半导体器件或其部件的方法或设备;其零部件 |
--------H01L31/02 | .零部件 |
----------H01L31/10 | ..特点在于至少有一个电位跃变势垒或表面势垒的,例如光敏晶体管 |
------------H01L31/101 | ...对红外、可见或紫外辐射敏感的器件 |
--------------H01L31/102 | ....仅以一个势垒或面垒为特征的 |
----------------H01L31/105 | .....为PIN型势垒的 |