![用于确定在气体混合物中含有的物质的气体传感器及其制备方法](/CN/2013/1/66/images/201310331204.jpg)
基本信息:
- 专利标题: 用于确定在气体混合物中含有的物质的气体传感器及其制备方法
- 专利标题(英):Gas sensor for determining substances contained in a gas mixture and method for producing such a sensor
- 申请号:CN201310331204.9 申请日:2013-08-01
- 公开(公告)号:CN103575788A 公开(公告)日:2014-02-12
- 发明人: A.克劳斯 , A.马丁
- 申请人: 罗伯特·博世有限公司
- 申请人地址: 德国斯图加特
- 专利权人: 罗伯特·博世有限公司
- 当前专利权人: 罗伯特·博世有限公司
- 当前专利权人地址: 德国斯图加特
- 代理机构: 中国专利代理(香港)有限公司
- 代理人: 周铁; 林森
- 优先权: 102012213621.5 2012.08.02 DE
- 主分类号: G01N27/414
- IPC分类号: G01N27/414
The present disclosure relates to a gas sensor (10) for determining substances contained in a gas mixture, comprising a substrate (12) on which a source electrode (18), a drain electrode (20) and a gate electrode (22) are arranged, at least one electrically insulating layer (28) being arranged between the substrate (12) and the gate electrode (22), the gate electrode (22) comprising an electrically conductive ceramic material, and the gate electrode (22) having a range of variation of its thickness that is greater than or equal to one quarter of its total thickness. Such a gas sensor (10) may have in particular improved measuring characteristics and, furthermore, allow itself to be produced in an improved way. The present disclosure also relates to a method for producing such a gas sensor (10).
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
------G01N27/00 | 用电、电化学或磁的方法测试或分析材料 |
--------G01N27/02 | .通过测试阻抗 |
----------G01N27/28 | ..电解池部件 |
------------G01N27/414 | ...对离子敏感的场效应晶体管或化学场效应晶体管,即ISFETS或CHEMFETS |