![一种基于结构自激振动原理的微机电谐振器](/CN/2013/1/55/images/201310279863.jpg)
基本信息:
- 专利标题: 一种基于结构自激振动原理的微机电谐振器
- 专利标题(英):Micro electromechanical resonator based on structural self-excited vibration principle
- 申请号:CN201310279863.2 申请日:2013-07-04
- 公开(公告)号:CN103338021A 公开(公告)日:2013-10-02
- 发明人: 闫晓军 , 漆明净
- 申请人: 北京航空航天大学
- 申请人地址: 北京市海淀区学院路37号
- 专利权人: 北京航空航天大学
- 当前专利权人: 北京航空航天大学
- 当前专利权人地址: 北京市海淀区学院路37号
- 代理机构: 北京科迪生专利代理有限责任公司
- 代理人: 成金玉; 顾炜
- 主分类号: H03H9/24
- IPC分类号: H03H9/24 ; H03H9/02
The invention discloses a micro electromechanical resonator based on a structural self-excited vibration principle, which comprises an insulation support pedestal, a conducting micro beam, two direct current driving electrodes and a substrate, wherein the insulation support pedestal is neither connected with any electrode nor grounded, that is electric potential is floating; one end of the conducting micro beam is fixed on the insulation support pedestal; the other end of the conducting micro beam is horizontally overhung; the two direct current driving electrodes are placed on the two sides of the conducting micro beam; one of the direct current driving electrodes is connected into direct current positive voltage; the other direct current driving electrode is connected into direct current negative voltage; a certain distance is kept between the two direct current driving electrodes; and the insulation support pedestal and the direct current driving electrodes are fixed on the substrate. The micro electromechanical resonator abandons a complicated alternating current driving/detection circuit essential to the traditional resonator, and eliminates a short circuit risk arising from structure destabilization; a structure is simplified; and resonance amplitude is increased greatly.
IPC结构图谱:
H | 电学 |
--H03 | 基本电子电路 |
----H03H | 阻抗网络,例如谐振电路;谐振器 |
------H03H9/00 | 包括机电或电声元件的网络,如谐振电路 |
--------H03H9/24 | .不用压电、电致伸缩或磁致伸缩材料的谐振器的结构特点 |