基本信息:
- 专利标题： 一种真空镀膜装置
- 专利标题（英）：Vacuum coating device
- 申请号：CN201310093402.6 申请日：2013-03-20
- 公开(公告)号：CN103147052A 公开(公告)日：2013-06-12
- 发明人： 徐海波 , 仲梁维
- 申请人： 上海理工大学
- 申请人地址： 上海市杨浦区军工路516号
- 专利权人： 上海理工大学
- 当前专利权人： 上海理工大学
- 当前专利权人地址： 上海市杨浦区军工路516号
- 代理机构： 上海德昭知识产权代理有限公司
- 代理人： 郁旦蓉
- 主分类号： C23C14/34
- IPC分类号： C23C14/34 ; C23C14/50
The invention provides a vacuum coating device capable of making the best of a coating material for coating. The vacuum coating device used for coating the coating material on a substrate comprises a vacuum chamber, a rotating shaft, a coating material placing department support seat and a plurality of clamps used for clamping the substrate. The vacuum chamber is characterized by being provided with two coating pots and a base plate bearing department, wherein one coating pot serves as the substrate, and the other coating pot serves as the coating material placing department used for placing the coating material; and the base plate bearing department is connected with the rotating shaft and is used for bearing the coating pot serving as the substrate and loading the plurality of clamps.
公开/授权文献:
- CN103147052B 一种真空镀膜装置 公开/授权日：2015-01-21