
基本信息:
- 专利标题: 一种合金氧化物薄膜晶体管的制备方法
- 专利标题(英):Production method of alloy oxide thin-film transistor
- 申请号:CN201310042052.0 申请日:2013-02-04
- 公开(公告)号:CN103117226A 公开(公告)日:2013-05-22
- 发明人: 单福凯 , 刘奥 , 刘国侠 , 朱慧慧
- 申请人: 青岛大学
- 申请人地址: 山东省青岛市崂山区中国香港东路7号
- 专利权人: 青岛大学
- 当前专利权人: 青岛大学
- 当前专利权人地址: 山东省青岛市崂山区中国香港东路7号
- 代理机构: 青岛高晓专利事务所
- 代理人: 张世功
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/285 ; H01L21/203
The invention belongs to the technical field of production of semiconductor material thin-film transistors and relates to a production method of an alloy oxide thin-film transistor. After a P-type silicon substrate and an aluminum oxide ceramic target are placed in an existing pulse laser ablation device, the aluminum oxide ceramic target is subjected to pulse laser ablation and an aluminum oxide ceramic target film sample is formed on the P-type substrate by deposition. The surface of the Al2O3 ceramic target film sample is cleaned, ITZO (indium tin zinc oxide) semiconductor channel layer is made on the surface of a gate medium layer of the cleaned Al2O3 ceramic target film sample, TFT (thin film transistor) channels different in length and width are made by photoetching, and alloy semiconductor film channel layer material is deposited on a high-k gate medium layer at room temperature by radio frequency magnetron sputtering technology. Ni is deposited at room temperature by ion beam sputtering technology to form a source electrode and a drain electrode. The source electrode and the drain electrode are obtained after photoresist is stripped, and the alloy oxide thin-film transistor is obtained after annealing. The production process is simple, the principle is reliable, production performance is fine, production is environment-friendly, and the production method is low in cost and widely applicable.
公开/授权文献:
- CN103117226B 一种合金氧化物薄膜晶体管的制备方法 公开/授权日:2015-07-01
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/02 | .半导体器件或其部件的制造或处理 |
----------H01L21/027 | ..未在H01L21/18或H01L21/34组中包含的为进一步的光刻工艺在半导体之上制作掩膜 |
------------H01L21/18 | ...器件有由周期表第Ⅳ族元素或含有/不含有杂质的AⅢBⅤ族化合物构成的半导体,如掺杂材料 |
--------------H01L21/26 | ....用波或粒子辐射轰击的 |
----------------H01L21/335 | .....场效应晶体管 |
------------------H01L21/336 | ......带有绝缘栅的 |