![隔离型高耐压场效应管及版图结构](/CN/2011/1/68/images/201110340126.jpg)
基本信息:
- 专利标题: 隔离型高耐压场效应管及版图结构
- 专利标题(英):Isolation type high voltage resistance field effect transistor (FET) and layout structure
- 申请号:CN201110340126.X 申请日:2011-11-01
- 公开(公告)号:CN103094317A 公开(公告)日:2013-05-08
- 发明人: 金锋 , 董科 , 董金珠
- 申请人: 上海华虹NEC电子有限公司
- 申请人地址: 上海市浦东新区川桥路1188号
- 专利权人: 上海华虹NEC电子有限公司
- 当前专利权人: 上海华虹宏力半导体制造有限公司
- 当前专利权人地址: 上海市浦东新区川桥路1188号
- 代理机构: 上海浦一知识产权代理有限公司
- 代理人: 丁纪铁
- 主分类号: H01L29/08
- IPC分类号: H01L29/08 ; H01L29/06 ; H01L29/78
The invention discloses an isolation type high voltage resistance field effect transistor (FET). A drift area of a drain region on a silicon substrate is extended to cover a whole source region, the isolation of a substrate of the source region and the silicon substrate is realized, and therefore the effects that the substrate electric potential of the FET cannot be affected by the electric potential of the silicon substrate, and the electric potential can be added independently can be achieved. The invention further provides a layout structure of the isolation type high voltage resistance FET. The layout structure of the isolation type high voltage resistance FET comprises the drain region, the source region, the drain region drift area, a drift region, a source region poly silicon field plate, grid electrodes and a drain region poly silicon field plate, wherein the source region poly silicon field plate, the grid electrodes and the drain region poly silicon field plate are all in U-shaped enclosed structures, and the drain region poly silicon field plate is located inside the source region poly silicon field plate and the grid electrodes. Due to the structure that the source region completely surrounds the drain region, and meanwhile, the substrate, drift region implantation and a doped region are adopted at a circular arc position at the bottom of a U-shaped inner layer to form an isolation voltage resistance ring, the situation that high voltage electric potential is located outside the position, and low voltage electric potential is located inside the position is avoided, breakdown voltage can be affected in a concentrative mode by a power line, and therefore the high voltage resistant capacity is achieved, and the area of a device is reduced at the same time.
公开/授权文献:
- CN103094317B 隔离型高耐压场效应管的版图结构 公开/授权日:2015-10-14