
基本信息:
- 专利标题: 一种晶体硅背面点接触的制备方法
- 专利标题(英):Preparation method of back side point contact of crystalline silicon
- 申请号:CN201310006876.2 申请日:2013-01-08
- 公开(公告)号:CN103078008A 公开(公告)日:2013-05-01
- 发明人: 徐冬星 , 倪建林 , 闻二成
- 申请人: 浙江光普太阳能科技有限公司
- 申请人地址: 浙江省湖州市长兴县经济开发区经四路588号
- 专利权人: 浙江光普太阳能科技有限公司
- 当前专利权人: 浙江光普太阳能科技有限公司
- 当前专利权人地址: 浙江省湖州市长兴县经济开发区经四路588号
- 代理机构: 杭州华鼎知识产权代理事务所
- 代理人: 胡根良
- 主分类号: H01L31/18
- IPC分类号: H01L31/18
The invention discloses a preparation method of the back side point contact of crystalline silicon. The preparation method comprises the following steps that 1, the monocrystalline silicon wafer surface is subjected to damaged layer removal, and in addition, the textured velvet structure is formed; 2, a velvet silicon wafer is inserted into a quartz boat for diffusion to form PN junctions, and a square resistor is formed at the front side of the silicon wafer; 3, the PN junctions at the periphery and the back side of the silicon wafer are removed, and meanwhile, HF (hydrogen fluoride) is adopted for carrying out roughness removal diffusion to form phosphorosilicate glass; 4, silicon nitride passivation antireflection coatings are respectively deposited at the front and back sides of the silicon wafer by a microwave method plasma chemical vapor deposition method, and in addition, points for point contact are preserved on the back side; and 5, a screen printing technology is adopted for sequentially printing a front side electrode, a back electric field and a back electrode of a battery, the back electrode is printed with silver paste, the back electric field is printed with aluminum paste, the front side electrode is printed with sliver paste, and in addition, good ohmic contact is formed through sintering. The preparation method has the advantages that silicon nitride films are plated on the front side and the back side of the silicon wafer, meanwhile, the points for point contact are preserved on the silicon nitride layer at the back side, the process is simple, and the manufacture cost is reduced.
公开/授权文献:
- CN103078008B 一种晶体硅背面点接触的制备方法 公开/授权日:2015-09-02