
基本信息:
- 专利标题: 一种石墨烯霍尔集成电路及其制备方法
- 专利标题(英):Graphene Hoare integrated circuit and preparation method thereof
- 申请号:CN201210575355.4 申请日:2012-12-26
- 公开(公告)号:CN103066098A 公开(公告)日:2013-04-24
- 发明人: 徐慧龙 , 张志勇 , 彭练矛 , 王胜
- 申请人: 北京大学
- 申请人地址: 北京市海淀区颐和园路5号北京大学
- 专利权人: 北京大学
- 当前专利权人: 北京大学
- 当前专利权人地址: 北京市海淀区颐和园路5号北京大学
- 代理机构: 北京君尚知识产权代理事务所
- 代理人: 余长江
- 主分类号: H01L27/22
- IPC分类号: H01L27/22 ; H01L43/10 ; H01L43/06 ; H01L23/538 ; H01L43/14
The invention discloses a grapheme Hoare integrated circuit and a preparation method thereof. The grapheme Hoare integrated circuit comprises a silica-based complementary metal-oxide-semiconductor transistor (CMOS) circuit chip and a grapheme Hoare element. A plurality of interconnection electrodes and bonding electrodes are arranged on the periphery of a core circuit area of the chip. A passivation layer covers the surface area of the chip without the interconnection electrodes and the bonding electrodes. The interconnection electrodes and the bonding electrodes are respectively electrically connected with the bonding electrodes through metal wires under the passivation layer. An organic molecule layer and the grapheme Hoare element are successively arranged on the passivation layer which is above the core circuit area of the chip. Electrodes of the grapheme Hoare element are respectively connected with the interconnection electrodes through metal interconnection wires. Due to the fact that the surface of the Hoare integrated circuit is sealed by being covered with the passivation layer, only the bonding electrodes are showed, the bonding electrodes can conveniently be connected with external circuits in actual use. The grapheme Hoare integrated circuit is prepared completely through micromachining method, required chip area is small, preparation efficiency is high, and cost is low.
公开/授权文献:
- CN103066098B 一种石墨烯霍尔集成电路及其制备方法 公开/授权日:2016-02-10
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L27/00 | 由在一个共用衬底内或其上形成的多个半导体或其他固态组件组成的器件 |
--------H01L27/22 | .包括有利用电—磁效应的组件的,例如霍尔效应;应用类似磁场效应的 |