![一种离子源灯丝及其夹持装置](/CN/2011/1/48/images/201110241135.jpg)
基本信息:
- 专利标题: 一种离子源灯丝及其夹持装置
- 专利标题(英):Ion source filament and clamping device therefor
- 申请号:CN201110241135.3 申请日:2011-08-22
- 公开(公告)号:CN102956421A 公开(公告)日:2013-03-06
- 发明人: 胡宝富 , 彭立波 , 伍三忠
- 申请人: 北京中科信电子装备有限公司
- 申请人地址: 北京市中关村科技园通州园光机电一体化产业基地兴光二街六号
- 专利权人: 北京中科信电子装备有限公司
- 当前专利权人: 北京中科信电子装备有限公司
- 当前专利权人地址: 北京市中关村科技园通州园光机电一体化产业基地兴光二街六号
- 主分类号: H01J37/08
- IPC分类号: H01J37/08 ; H01J37/317
The invention discloses an ion source filament used for an ion implanter and a clamping device for the ion source filament. An ion source used for the ion implanter can produce wide belts or flat belts, the filament and the clamping device for the filament allow for normal operation of the ion source, and accordingly stable strong electrons are produced. The clamping device for the filament mainly comprises the filament (1), a filament connecting rod (2), a graphite support plate (3), an insulated ceramic seat (4), a filament clamp (5), a power input belt (6) and the like. The clamping device for the filament is characterized in that the special filament (1) is disposed on the filament connecting rod (2), and the special filament clamp (5) is connected with the filament connecting rod (2) and the power input belt (6); and the filament (1) can emit high-strength electrons, and the filament clamp (5) can firmly fix the filament connecting rod (2) and transmit high voltage. Detailed explanation of operation principle of the clamping device for the filament is shown and a specific implementation scheme is given in an instruction book.
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01J | 放电管或放电灯 |
------H01J37/00 | 有把物质或材料引入使受到放电作用的结构的电子管,如为了对其检验或加工的 |
--------H01J37/02 | .零部件 |
----------H01J37/04 | ..电极装置及与产生或控制放电的部件有关的装置,如电子光学装置,离子光学装置 |
------------H01J37/08 | ...离子源;离子枪 |