基本信息:
- 专利标题： 压电元件的制造方法
- 专利标题（英）：Method for manufacturing piezoelectric element
- 申请号：CN201180024975.2 申请日：2011-05-25
- 公开(公告)号：CN102906891A 公开(公告)日：2013-01-30
- 发明人： 大西孝生 , 清水秀树 , 海老个濑隆
- 申请人： 日本碍子株式会社
- 申请人地址： 日本爱知县
- 专利权人： 日本碍子株式会社
- 当前专利权人： 日本碍子株式会社
- 当前专利权人地址： 日本爱知县
- 代理机构： 北京银龙知识产权代理有限公司
- 代理人： 金鲜英; 刘强
- 优先权： 2010-120698 2010.05.26 JP
- 国际申请： PCT/JP2011/061962 2011.05.25
- 国际公布： WO2011/148969 JA 2011.12.01
- 进入国家日期： 2012-11-20
- 主分类号： H01L41/22
- IPC分类号： H01L41/22 ; H01L41/187 ; H01L41/25 ; H01L41/43 ; C04B35/493
Disclosed is a method for manufacturing a piezoelectric element, which has: a step wherein a green sheet (A) including a portion to be a fired piezoelectric body later is manufactured using a piezoelectric material; a step wherein, a green sheet (B) is bonded to at least one surface of the green sheet (A), said green sheet (B) having, as an opening, a portion that faces the portion to be the fired piezoelectric body later, then, firing is performed, and a reinforcing plate-attached fired piezoelectric body is obtained, said reinforcing plate being formed by firing the green sheet (B); and a step wherein a film-like electrode is formed on the portion formed by firing the green sheet (A), said portion being a part of the reinforcing plate-attached fired piezoelectric body. With the method for manufacturing the piezoelectric element, the piezoelectric element provided with the thin fired piezoelectric body having a high planarity can be obtained.
IPC结构图谱:
| H | 电学 |
| --H04 | 电通信技术 |
| ----H04R | 扬声器、送话器、唱机拾音器或类似的传感器 |
| ------H01L41/22 | .专门适用于制造或处理这些器件或其部件的方法或设备 |