
基本信息:
- 专利标题: 一种氧化锌基管状旋转靶材的制备方法
- 专利标题(英):Preparation method of zinc oxide-based tubular rotary target material
- 申请号:CN201210041328.9 申请日:2012-02-23
- 公开(公告)号:CN102603285A 公开(公告)日:2012-07-25
- 发明人: 刘孝宁 , 刘秉宁 , 孙本双 , 杨小林 , 王廷东 , 马建保 , 韩建华
- 申请人: 西北稀有金属材料研究院
- 申请人地址: 宁夏回族自治区石嘴山市大武口冶金路119号
- 专利权人: 西北稀有金属材料研究院
- 当前专利权人: 宁夏中色新材料有限公司
- 当前专利权人地址: 宁夏回族自治区石嘴山市大武口冶金路119号
- 代理机构: 宁夏专利服务中心
- 代理人: 赵明辉
- 主分类号: C04B35/453
- IPC分类号: C04B35/453 ; C04B35/622 ; C04B35/64
The invention relates to a preparation method of a zinc oxide-based tubular rotary target material. The preparation method comprises the following steps: taking NH4HCO3 as a precipitant, preparing pure zinc oxide powder and Al-doped zinc oxide powder with an atomic ratio of 1-7at% by a chemical precipitation method, presintering, conglomerating and shaping the powder, filling the powder into a mould, moulding the powder in a cold isostatic pressing manner at 300-340MPa, obtaining a biscuit with a relative density of 70-75%, sintering the biscuit under an oxidizing atmosphere, and processing the sintered biscuit to obtain the rotary target material. Compared with the prior art, the preparation method provided by the invention has the beneficial effects that the density of the biscuit is improved by 10-15%; the volume shrinkage in later stage sintering is reduced; the sintering deformation of the tubular target with a large length-diameter ratio is effectively controlled; and in the process of sintering, the circulating oxygen is served as a control atmosphere to avoid the component changing, large pores on the surface and density reduction caused by the large pores on the surface.
公开/授权文献:
- CN102603285B 一种氧化锌基管状旋转靶材的制备方法 公开/授权日:2013-08-28