基本信息:
- 专利标题： 一种天线耦合碲镉汞太赫兹探测器
- 专利标题（英）：Antenna-coupled tellurium-cadmium-mercury terahertz detector
- 申请号：CN201110191846.4 申请日：2011-07-11
- 公开(公告)号：CN102376812A 公开(公告)日：2012-03-14
- 发明人： 黄志明 , 陆金星 , 黄敬国 , 周炜 , 沈学民 , 魏彦峰 , 侯云 , 高艳卿 , 褚君浩
- 申请人： 中国科学院上海技术物理研究所
- 申请人地址： 上海市虹口区玉田路500号
- 专利权人： 中国科学院上海技术物理研究所
- 当前专利权人： 中国科学院上海技术物理研究所
- 当前专利权人地址： 上海市虹口区玉田路500号
- 代理机构： 上海新天专利代理有限公司
- 代理人： 郭英
- 主分类号： H01L31/08
- IPC分类号： H01L31/08 ; H01L31/0224 ; H01L31/0352 ; H01Q1/44
The invention discloses an antenna-coupled tellurium-cadmium-mercury terahertz detector, which has the advantages of high detection sensitivity, high response speed, compact structure, and capability of working at room temperature and being integrated on a large scale and is used for carrying out real-time detection imaging on terahertz signals. The detector is characterized in that: based on a hot carrier absorption effect of a narrow-gap semiconductor, a tellurium-cadmium-mercury material with proper composition is selected, a reasonable and feasible antenna coupling structure is designed, photoetching, etching and sputtering process are carried out, and signal reading-out is carried out by using a preamplifier circuit, thus detection of the terahertz signals is realized. The preparation process of the material used by the device disclosed by the invention is mature, and the detection of line array or array can be achieved.
公开/授权文献:
- CN102376812B 一种天线耦合碲镉汞太赫兹探测器 公开/授权日：2013-08-14