The invention discloses a recycling hydrogen purification processing method for producing polysilicon by reducing trichlorosilane. Two groups of metal palladium composite membrane hydrogen purifiers which are serially connected are adopted for carrying out purification processing on recycling hydrogen obtained by trichlorosilane reduction, wherein the first group of metal palladium composite membrane hydrogen purifiers are relatively larger, the ultra-pure hydrogen (H2 purity is more than 99.9999%) after purification processing is returned to a reducing furnace and used as a raw material gas for trichlorosilane reduction; and the second group of hydrogen purifiers are relatively smaller, and the high-pure hydrogen (H2 purity is 99.999%) after purification processing is transmitted to a hydrogen cooling chemical section and used as a raw material gas. The recovery ratio of the recycling hydrogen after the purification processing by adopting the method disclosed by the invention can reach 99%. When hydrogen chloride content is higher in the recycling hydrogen, a necessary dechlorination measure is adopted for lowering HCl content below 0.5 ppm. By adopting the hydrogen purified by the method disclosed by the invention to produce the polysilicon, purity and quality of the polysilicon products can be obviously improved, and an obvious energy-saving emission reduction effect is achieved.