
基本信息:
- 专利标题: 双向传递片盒机构
- 专利标题(英):Bidirectional transmission wafer box mechanism
- 申请号:CN201010284589.4 申请日:2010-09-17
- 公开(公告)号:CN102024729A 公开(公告)日:2011-04-20
- 发明人: 魏猛 , 郑春海
- 申请人: 沈阳芯源微电子设备有限公司
- 申请人地址: 辽宁省沈阳市浑南新区飞云路16号
- 专利权人: 沈阳芯源微电子设备有限公司
- 当前专利权人: 沈阳芯源微电子设备有限公司
- 当前专利权人地址: 辽宁省沈阳市浑南新区飞云路16号
- 代理机构: 沈阳科苑专利商标代理有限公司
- 代理人: 张志伟
- 主分类号: H01L21/673
- IPC分类号: H01L21/673 ; H01L21/677
The invention relates to relevant fields of gummed developing and semiconductor wafer processing, in particular to a bidirectional transmission wafer box mechanism which is used for a gummed developing device, a single-chip wet processing device, and the like for obtaining evenly-distributed photoresist and photoresist graphs on a semiconductor wafer and solves the problems that when entering and exiting a wafer box, the wafer only can carry out unidirectional movement to influence production capacity of a whole machine, and the like in the prior art. The bidirectional transmission wafer box mechanism is provided with a wafer box, blocking piece rotating rods, a synchronous pulley, a synchronous belt and a 180-degree swing cylinder, wherein the four blocking piece rotating rods are symmetrically arranged in the wafer box, the lower end of each blocking piece rotating rod is connected with the synchronous pulley, two blocking piece rotating rods which are respectively positioned on inlets of both sides of the wafer box are in one group, and the two blocking piece rotating rods of each group are connected with the 180-degree swing cylinder through the synchronous pulley and the synchronous belt. Due to the adoption of the invention, the wafer bilaterally enters and exits the wafer box, and the fetching and delivering modes of the traditional wafers of the gummed developing device on the wafer box are broken though, the transporting process of a robot and intermediate links are reduced and the efficiency is improved.
公开/授权文献:
- CN102024729B 双向传递片盒机构 公开/授权日:2012-06-27