
基本信息:
- 专利标题: 具有低的热漂移的微机电z轴探测结构
- 专利标题(英):Microelectromechanical z-axis detection structure with low thermal drifts
- 申请号:CN201010288878.1 申请日:2010-08-02
- 公开(公告)号:CN101987718B 公开(公告)日:2015-03-11
- 发明人: G·卡扎尼加 , L·科罗纳托 , B·希莫尼
- 申请人: 意法半导体股份有限公司
- 申请人地址: 意大利阿格拉布里安扎
- 专利权人: 意法半导体股份有限公司
- 当前专利权人: 意法半导体国际公司
- 当前专利权人地址: 瑞士日内瓦
- 代理机构: 北京市金杜律师事务所
- 代理人: 王茂华; 唐文静
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; G01P15/125
A MEMS detection structure (10) comprising a substrate (2) having a top surface (2a) with at least a first fixed-electrode arrangement (5a); a sensing mass (3) extending in a plane (xy) and suspended above the substrate (2) and above the first fixed-electrode arrangement (5a) at a separation distance; and connection elastic elements (8a, 8b) supporting the sensing mass (3) for being freely rotatable out of the plane (xy), modifying the separation distance as a function of a detected quantity along an axis (z) orthogonal to the plane (xy). The MEMS detection structure further comprises a coupling mass (12), suspended above the substrate (2) and connected to the sensing mass (3) via the connection elastic elements (8a, 8b) and an anchoring arrangement (14, 15), which anchors the coupling mass (12) to the substrate (2) with at least a first point of constraint (13), set at a distance from the rotation axis (A) and in a position corresponding to the first fixed-electrode arrangement (5a).
公开/授权文献:
- CN101987718A 具有低的热漂移的微机电z轴探测结构 公开/授权日:2011-03-23
IPC结构图谱:
B | 作业;运输 |
--B81 | 微观结构技术 |
----B81B | 微观结构的装置或系统,例如微观机械装置 |
------B81B3/00 | 由柔性或可变形的元件组成的装置,例如由弹性舌或膜片组成 |