![碲镉汞微台面红外探测芯片的光敏感元列阵成形方法](/CN/2009/1/39/images/200910198967.jpg)
基本信息:
- 专利标题: 碲镉汞微台面红外探测芯片的光敏感元列阵成形方法
- 专利标题(英):Light sensitive component array forming method of mercury cadmium telluride micro-table-board infrared detection chip
- 申请号:CN200910198967.4 申请日:2009-11-18
- 公开(公告)号:CN101740502B 公开(公告)日:2011-04-27
- 发明人: 叶振华 , 尹文婷 , 马伟平 , 黄建 , 林春 , 胡晓宁 , 丁瑞军 , 何力
- 申请人: 中国科学院上海技术物理研究所
- 申请人地址: 上海市玉田路500号
- 专利权人: 中国科学院上海技术物理研究所
- 当前专利权人: 中国科学院上海技术物理研究所
- 当前专利权人地址: 上海市玉田路500号
- 代理机构: 上海新天专利代理有限公司
- 代理人: 郭英
- 主分类号: H01L21/82
- IPC分类号: H01L21/82 ; H01L31/18
The invention discloses a light sensitive component array forming method of a mercury cadmium telluride micro-table-board infrared detection chip, which relates to a manufacturing process technology of a photoelectric detector. The invention adopts the technical scheme that the forming method comprises the following steps of: firstly manufacturing a photoresist masking film graph for forming a deep micro-table-board array chip isolated groove on the surface of a mercury cadmium telluride infrared focal plane detection chip, then filling a certain quantity of bromine and hydrobromic acid mixedcorrosive liquid of a mercury cadmium telluride material in a groove graph formed from a photoresist masking film by utilizing a spin-coating method, and controlling the depth of the isolated groove required by a deep micro-table-board array chip through controlling the depth and the corrosion time of the isolated groove graph formed from the photoresist masking film, thereby effectively solving the problems of process damage and low duty ratio existing in a conventional light sensitive component array forming method. The method has the characteristics of complete compatibility with a conventional process of the HgCdTe detection chip, low cost, high controllability, high uniformity, no process-induced electrical damage and the like.
公开/授权文献:
- CN101740502A 碲镉汞微台面红外探测芯片的光敏感元列阵成形方法 公开/授权日:2010-06-16
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/67 | .专门适用于在制造或处理过程中处理半导体或电固体器件的装置;专门适合于在半导体或电固体器件或部件的制造或处理过程中处理晶片的装置 |
----------H01L21/71 | ..限定在组H01L21/70中的器件的特殊部件的制造 |
------------H01L21/78 | ...把衬底连续地分成多个独立的器件 |
--------------H01L21/82 | ....制造器件,例如每一个由许多元件组成的集成电路 |