![一种Al掺杂ZnO半导体纳米柱的制备方法](/CN/2009/1/47/images/200910238792.jpg)
基本信息:
- 专利标题: 一种Al掺杂ZnO半导体纳米柱的制备方法
- 专利标题(英):Preparation method of Al-mixed ZnO semiconductor nanometer column
- 申请号:CN200910238792.5 申请日:2009-11-30
- 公开(公告)号:CN101704509A 公开(公告)日:2010-05-12
- 发明人: 常永勤 , 杨林 , 崔兴达
- 申请人: 北京科技大学
- 申请人地址: 北京市海淀区学院路30号
- 专利权人: 北京科技大学
- 当前专利权人: 北京科技大学
- 当前专利权人地址: 北京市海淀区学院路30号
- 代理机构: 北京东方汇众知识产权代理事务所
- 代理人: 刘淑芬
- 主分类号: B82B3/00
- IPC分类号: B82B3/00
The invention provides a preparation method of an Al-mixed ZnO semiconductor nanometer column, which comprises the following steps: weighing Zn powder and Fe powder, evenly mixing, and putting into a corundum boat; leading the surface of silicon wafer, which is plated with a gold film, to be downwards faced; fixing above the corundum boat; aerating with Ar gas; heating up and cooling with a furnace to prepare a ZnO nanometer seed crystal; preparing growth solution; heating up and stirring; putting the prepared ZnO nanometer seed crystal into the growth solution, and growing; taking out the silicon wafer and washing with deionized water; and naturally drying to obtain the Al-mixed ZnO nanometer column. The method combines the advantages of CVD and the advantage of the solution growth, does not need to react in vacuum, has lower growth temperature, obviously reduces the production cost, and prevents from using a reaction kettle, can be operated under normal pressure, thus simplifying experiment conditions, and is more moderate, and has simple technology and low cost.
IPC结构图谱:
B | 作业;运输 |
--B82 | 超微技术 |
----B82B | 超微结构;超微结构的制造或处理 |
------B82B3/00 | 超微结构的制造或处理 |