基本信息:
- 专利标题： 氙回收系统及回收设备
- 专利标题（英）：Xenon retrieval system and retrieval device
- 申请号：CN200780044543.1 申请日：2007-11-30
- 公开(公告)号：CN101547857A 公开(公告)日：2009-09-30
- 发明人： 木本雅裕 , 小浦辉政 , 福田幸生 , 楢崎胜贵 , 桥本泰司 , 酒井彻 , 横木和夫
- 申请人： 乔治洛德方法研究和开发液化空气有限公司
- 申请人地址： 法国巴黎
- 专利权人： 乔治洛德方法研究和开发液化空气有限公司
- 当前专利权人： 乔治洛德方法研究和开发液化空气有限公司
- 当前专利权人地址： 法国巴黎
- 代理机构： 北京市中咨律师事务所
- 代理人： 林柏楠; 刘金辉
- 优先权： 325373/2006 2006.12.01 JP
- 国际申请： PCT/IB2007/054877 2007.11.30
- 国际公布： WO2008/065633 EN 2008.06.05
- 进入国家日期： 2009-06-01
- 主分类号： C01B23/00
- IPC分类号： C01B23/00
To provide a simple highly-pure Xe retrieval method and device with high retrieval efficiency by functionally removing such elements as water, CO2 and FCs from waste gases from semiconductor production processes, such as the plasma etching, that contain low-concentration Xe. For samples containing xenon and fluorocarbon, this invention is characterized by having at least first adsorption means (A1 ) filled with synthetic zeolite with pore size of 4A or smaller and aluminum oxide, arranged serially, gas separation means (A2) composed of silicone or polyethylene hollow fiber gas separation membrane modules 4, second adsorption means (A3) filled with either activated carbon, synthetic zeolite with pore size of 5A or larger, molecular sieving carbon with pore size of 5A or larger, or a combination of these, and reaction means (A4) filled with calcium compounds as reactant.
公开/授权文献:
- CN101547857B 氙回收系统及回收设备 公开/授权日：2012-03-21