基本信息:
- 专利标题： 镀膜系统及其隔离装置
- 专利标题（英）：Film coating system and isolation device thereof
- 申请号：CN200810003917.1 申请日：2008-01-11
- 公开(公告)号：CN101481789A 公开(公告)日：2009-07-15
- 发明人： 刘志宏 , 陈志明 , 苏濬贤 , 陈志玮 , 许文通 , 林春宏
- 申请人： 财团法人工业技术研究院
- 申请人地址： 中国台湾新竹县
- 专利权人： 财团法人工业技术研究院
- 当前专利权人： 财团法人工业技术研究院
- 当前专利权人地址： 中国台湾新竹县
- 代理机构： 北京市柳沈律师事务所
- 代理人： 彭久云
- 主分类号： C23C14/32
- IPC分类号： C23C14/32
The invention discloses a filming system and an isolating device thereof. The filming system is used for filming objects. The filming system comprises a work station and an isolating device. The objects are disposed at the work station. The isolating device is used for isolating the objects. The isolating device comprises a body, a first working fluid, a second working fluid, a first guidance part and a second guidance part. The body is used for producing first energy. The first guidance part is used for guiding the first working fluid through the body to form a first working area, and the objects are coated at the first working area. The second guidance part is used for guiding the second working fluid through the body, and the second working fluid is activated by the first energy produced by the body to form a second working area, and the objects are isolated from the first working area by using the second working area.
公开/授权文献:
- CN101481789B 镀膜系统及其隔离装置 公开/授权日：2012-03-21