基本信息:
- 专利标题： 液浸显微镜装置
- 专利标题（英）：Liquid immersion microscope
- 申请号：CN200680039343.2 申请日：2006-10-18
- 公开(公告)号：CN101292186A 公开(公告)日：2008-10-22
- 发明人： 柴田浩匡 , 小松学 , 内川敏男
- 申请人： 株式会社尼康
- 申请人地址： 日本东京都
- 专利权人： 株式会社尼康
- 当前专利权人： 株式会社尼康
- 当前专利权人地址： 日本东京都
- 代理机构： 永新专利商标代理有限公司
- 代理人： 徐殿军
- 优先权： 307606/2005 2005.10.21 JP
- 国际申请： PCT/JP2006/320761 2006.10.18
- 国际公布： WO2007/046429 JA 2007.04.26
- 进入国家日期： 2008-04-21
- 主分类号： G02B21/00
- IPC分类号： G02B21/00
It is possible to provide a liquid immersion microscope capable of performing liquid immersion observation of a substrate in a nondestructive way without deteriorating the substrate quality. For this, the liquid immersion microscope includes: support means (11-13) for supporting a substrate (10A) as an observation object; an objective lens (14) of the liquid immersion system; first supply means (15, 16) for supplying ultra pure water as an observation liquid between the tip end of the objective lens and the substrate; first removal means (20-22) for removing the observation liquid after observation of the substrate; second supply means (17-19) for supplying a cleaning liquid different from the observation liquid removed by the first removal means (20-22) to an area of the substrate which has been in contact with the observation liquid; and second removal means (20-22) for removing the cleaning liquid after cleaning the substrate.
公开/授权文献:
- CN101292186B 液浸显微镜装置 公开/授权日：2010-06-09